Constant-temperature fluid supply system

ABSTRACT

A constant-temperature fluid supply system is provided with a first constant-temperature fluid supply apparatus and a second constant-temperature fluid supply apparatus. The first constant-temperature fluid supply apparatus has an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied. The second constant-temperature fluid supply apparatus has an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromprior Japanese Patent Applications No. 2004-309705, filed Oct. 25, 2004;and No. 2005-299606, filed Oct. 14, 2005 the entire contents of both ofwhich are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a constant-temperature fluid supplysystem adapted for use in a semiconductor manufacturing apparatus andconfigured to control the temperature of a target device with a highdegree of accuracy.

2. Description of the Related Art

Devices that have to be kept at constant temperatures are provided withan internal fluid passage for constant-temperature water. By circulationof the constant-temperature water supplied from constant-temperaturefluid supply sources, the devices can be kept in theconstant-temperature state. In other words, the temperatures of thedevices can be kept at a stable value by maintaining the thermalequilibrium between the devices and the constant-temperature water. Ascan be seen from this, in order to stabilize the temperatures of thedevices with a high degree of accuracy, it is necessary to control thetemperature of the constant-temperature water with a high degree ofaccuracy (Jpn. UM Appln. KOKAI Publication No 5-25190).

To control the temperature of the constant-temperature water with a highdegree of accuracy, it is necessary to suppress the heat acting asexternal disturbances. Among the external disturbances, temperaturevariations of cooling water are a factor that may vary the temperatureof the constant-temperature water. Normally, the water provided by themunicipal water department (hereinafter referred to as tap water for thesake of simplicity) and the circulation water in plants are used as thecooling water. Those kinds of water are not controlled in temperature,and their temperatures inevitably vary. Due to the temperaturevariations of the cooling water, the constant-temperature water may alsovary in temperature even if the setting temperature is constant.

This problem is marked in the case of the cooling water for use in achiller unit. The tap water and the circulation water in plants are verylikely vary in temperature due to changes in the ambient temperature. Insome cases, they may undergo a temperature variation of about 10° C. ina day. Since this results in a change in the temperature of theconstant-temperature water, the target devices cannot be controlled witha high degree of accuracy.

As discussed above, the conventional constant-temperature fluid supplyapparatus has problems in that the temperature of theconstant-temperature fluid varies due to temperature variations of theexternally-provided cooling water.

BRIEF SUMMARY OF THE INVENTION

According to one aspect of the present invention, there is provided aconstant-temperature fluid supply system comprising:

a first constant-temperature fluid supply apparatus having an input sideto which a cooling fluid not controlled in temperature is supplied, andan output side from which a first constant-temperature fluid having astable temperature is supplied; and

a second constant-temperature fluid supply apparatus having an inputside to which the first constant-temperature fluid is supplied, and anoutput side from which a second constant-temperature fluid having a morestable temperature than that of the first constant-temperature fluid issupplied.

According to another aspect of the present invention, there is provideda constant-temperature fluid supply system configured to keep a firstportion and a second portion of an object at predetermined temperatures,the constant-temperature fluid supply system comprising:

a first constant-temperature fluid supply apparatus having an input sideto which a cooling fluid not controlled in temperature is supplied, andan output side from which a first constant-temperature fluid having astable temperature is supplied, part of the first constant-temperaturefluid being supplied to the first portion of the object; and

a second constant-temperature fluid supply apparatus having an inputside to which remaining part of the first constant-temperature fluid issupplied, and an output side from which a second constant-temperaturefluid having a more stable temperature than that of the firstconstant-temperature fluid is supplied.

According to still another aspect of the present invention, there isprovided a constant-temperature fluid supply system configured to keep afirst portion and a second portion of an object at predeterminedtemperatures, the constant-temperature fluid supply system comprising:

a first constant-temperature fluid supply apparatus having an input sideto which a cooling fluid not controlled in temperature is supplied, andan output side from which a first constant-temperature fluid having astable temperature is supplied; and

a second constant-temperature fluid supply apparatus having an inputside to which the first constant-temperature fluid is supplied, and anoutput side from which a second constant-temperature fluid having a morestable temperature than that of the first constant-temperature fluid issupplied.

a third constant-temperature fluid supply apparatus having an input sideto which the first constant-temperature fluid is supplied, and an outputside from which a third constant-temperature fluid having a more stabletemperature than that of the first constant-temperature fluid issupplied to the second portion of the object.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed outhereinafter.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate embodiments of the invention, andtogether with the general description given above and the detaileddescription of the embodiments given below, serve to explain theprinciples of the invention.

FIG. 1 is a schematic diagram showing a constant-temperature fluidsupply system according to the first embodiment.

FIG. 2 shows a specific structure of the first constant-temperaturefluid supply apparatus employed in the constant-temperature fluid supplysystem of the first embodiment.

FIG. 3 shows a specific structure of the second constant-temperaturefluid supply apparatus employed in the constant-temperature fluid supplysystem of the first embodiment.

FIG. 4 shows another specific structure of the firstconstant-temperature fluid supply apparatus employed in theconstant-temperature fluid supply system of the first embodiment.

FIG. 5 is a schematic diagram showing a constant-temperature fluidsupply system according to the second embodiment.

FIG. 6 is a schematic diagram showing a constant-temperature fluidsupply system according to the third embodiment.

FIG. 7 shows an example of an object whose temperature is to be keptconstant by the constant-temperature fluid supply systems of the secondand third embodiments.

FIG. 8 is a schematic diagram showing a constant-temperature fluidsupply system according to the fourth embodiment.

DETAILED DESCRIPTION OF THE INVENTION

The present invention will now be described in detail, referring to theembodiments shown in the accompanying drawings.

First Embodiment

In FIG. 1, reference numeral 10 denotes a first constant-temperaturefluid supply apparatus. Cooling water 101 (i.e., cooling fluid), whichis tap water or circulation water in plants, is supplied to the inputside of the apparatus 10. First constant-temperature water 102 (i.e., afirst constant-temperature fluid) is output from the output side of theapparatus 10. Reference numeral 20 denotes a second constant-temperaturefluid supply apparatus. First constant-temperature water 102 is suppliedto the input side of the apparatus 20 as cooling water. Secondconstant-temperature water 103 (i.e., a second constant-temperaturefluid) is output from the output side of the apparatus 20. The secondconstant-temperature water 103 is supplied to an external apparatus 30(i.e., an apparatus whose temperature is to be kept constant), formaintaining its constant temperature.

The first and second constant-temperature fluid supply apparatuses 10and 20 are connected together by means of a flexible connection hose andcan be separated, if necessary. The second constant-temperature fluidsupply apparatuses 20 and the external apparatus 30 are connectedtogether by means of a flexible connection hose and can be separated, ifnecessary. The first constant-temperature water 102 circulates betweenthe first and second constant-temperature fluid supply apparatuses 10and 20. The second constant-temperature water 103 circulates between thesecond constant-temperature fluid supply apparatus 20 and the externalapparatus 30.

The passage for the second constant-temperature water 103, i.e., thehose between the second constant-temperature fluid supply apparatus 20and the external apparatus 30, is covered with a heat insulatingmaterial to prevent external thermal effects. The external apparatus 30is installed in a temperature-controlled room.

As shown in FIG. 2, the first constant-temperature fluid supplyapparatus 10 is provided with an evaporator and a condenser and utilizesheat exchange for maintaining a constant temperature. The constant-fluidsupply apparatus 10 comprises a condenser 11, an evaporator 12, acompressor 13, an electromagnetic valve 15, a thermometer 16, acontroller 17 and a pump 18.

The cooling water 101 supplied to the constant-temperature fluid supplyapparatus 10 is used for cooling the condenser 11. After being cooledand adjusted in temperature by the evaporator 12, theconstant-temperature water 102 is supplied to the constant-temperaturefluid supply apparatus 20. The thermometer 16 is in theconstant-temperature water passage and located on the output side of theevaporator 12. The setting temperature of the constant-temperature water102 is entered to the controller 17, and a detection temperature whichthe thermometer 16 detects with respect to the constant-temperaturewater 102 is also supplied to the controller 17. Based on the differencebetween the setting temperature and the detection temperature, thecontroller 17 controls the openings of electromagnetic valves 14 and 15,thereby controlling the output of the evaporator 12. In this manner, theconstant-temperature water 102 is kept at the setting temperature.

As shown in FIG. 3, the second constant-temperature fluid supplyapparatus 20 employs a Peltier element 21 for maintaining the constanttemperature with a high degree of accuracy. A passage 22 for permittingconstant-temperature water 102 to flow is connected to the heat-wasteside (input side) of the Peltier element 21, and a passage 23 forpermitting constant-temperature water 103 to flow is connected to theheat-absorbent side (output side) of the Peltier element 21. With thisstructure, the Peltier element 21 is cooled by the constant-temperaturewater 102 having a comparatively stable temperature, and the Peltierelement 21 cools the constant-temperature water 103 so that the water103 has a very stable temperature.

Although not illustrated, the temperature of the water 102 on theheat-waste side of the Peltier element 21 is stable, and the water 103on the heat-absorbent side can be kept constant by controlling thecurrent supply. For strict control of the constancy, a temperaturesensor 24 may be provided in the passage 23 at a position downstream ofthe Peltier element 21. In this case, the output of the temperaturesensor 24 is fed back to the power supply 25 of the Peltier element 21,and the current supply to the Peltier element 21 is controlled inaccordance with the temperature detected by the temperature sensor 24.

In addition to the temperature sensor 24 described above, anothertemperature sensor may be provided at the position where the externalapparatus under temperature control is located. In accordance with thetemperatures detected by these two temperature sensors, the currentsupply to the Peltier element 21 may be controlled.

In the first embodiment, the first constant-temperature fluid supplyapparatus 10 uses is either tap water or circulation water in plants asthe cooling water 101. Since this type of water undergoes a temperaturevariation of about 10° C., the temperature variation of water 102 maynot be reduced to be less than 1/10° C. but can be 1/10° C. Since thefirst constant-temperature fluid supply apparatus 10 keeps thetemperature of water 102 constant to a certain extent (to be less than1/10° C.), and the water 102 whose temperature is controlled in thismanner is used as the cooling water of the second constant-temperaturefluid supply apparatus 20. Hence, the temperature of water 103 can bekept constant in a fully satisfactory manner. As a result, thetemperature variation of water 103 can be reduced to be less than 1/100°C.

In the case where the processing capacity of the firstconstant-temperature fluid supply apparatus 10 was set at 400 W and 5l/min, water 102 could be controlled to be 25° C±0.1° C. In addition tothis, where the processing capacity of the second constant-temperaturefluid supply apparatus 20 was set at 100 W and 5 l/min, water 103 couldbe controlled to be 25° C.±0.01° C.

Even an external apparatus 30 requiring highly accurate temperaturecontrol, such as the vacuum chamber of an electron beam exposureapparatus, can be stably kept at a constant temperature, without beingadversely affected by the temperature variations of cooling water 101.In addition to this, since the second constant-temperature fluid supplyapparatus 20 employs the Peltier element 21, it is small in size andenables very high temperature constancy. A plurality of Peltier elements21 may be used. In this case, different portions of the externalapparatus 30 can be independently controlled to have differenttemperatures.

The first and second constant-temperature fluid supply apparatuses 10and 20 are connected together by means of a hose, and if one of themdoes not operate normally, it is merely replaced with a new ornormally-operating apparatus. The time and cost required for restorationcan be reduced, accordingly. Furthermore, the first and secondconstant-temperature fluid supply apparatuses 10 and 20 may beapparatuses having the same function.

The first constant-temperature fluid supply apparatus 10 may use anordinary type of heat exchange, as shown in FIG. 4. In FIG. 4, referencenumeral 43 denotes a heat exchanger, reference numeral 46 denotes athermometer, reference numeral 47 denotes a controller, and referencenumeral 48 denotes a pump. In the case of the apparatus shown in FIG. 4,the controller 47 controls the flow rate of cooling water 101 inaccordance with the temperature the thermometer 46 measures, and thetemperature of water 102 can be controlled, accordingly.

Second Embodiment

FIG. 5 is a schematic diagram showing a constant-temperature fluidsupply system according to the second embodiment. In FIG. 5, similar orcorresponding structural elements are denoted by the same referencenumerals as used in FIG. 1, and a detailed description of suchstructural elements will be omitted herein.

The second embodiment differs from the first embodiment in that thefirst constant-temperature water 102 from the first constant-temperaturefluid supply apparatus 10 is supplied to not only to the secondconstant-temperature fluid supply apparatus 20 but also to an externalapparatus 301. In other words, part of the first constant-temperaturewater 102 is circulated between the first fluid supply apparatus 10 andthe external apparatus 301. With this structure, the temperature ofexternal apparatus 301 can be kept at a constant value to a certainextent (the temperature of external apparatus 301 cannot be soaccurately controlled as the temperature of external apparatus 30).

It is comparatively easy to improve the cooling performance of the firstconstant-temperature fluid supply apparatus 10. This is why the passageof the constant-temperature water 102 can be branched into sectionsconnected to different apparatuses, without causing any problems.External apparatuses 30 and 301 may be different positions of the sameelectron beam drawing apparatus. For example, external apparatus 30 maybe a sample chamber or an electronic lens barrel. External apparatus 301is, for example, an apparatus portion that generates much heat but doesnot require highly-controlled temperature accuracy.

Third Embodiment

FIG. 6 is a schematic diagram showing a constant-temperature fluidsupply system according to the third embodiment. In FIG. 6, similar orcorresponding structural elements are denoted by the same referencenumerals as used in FIG. 1, and a detailed description of suchstructural elements will be omitted herein.

The third embodiment differs from the first embodiment in that secondconstant-temperature fluid supply apparatuses 201 and 202 are providedin addition to the second constant-temperature fluid supply apparatus20. In other words, three second constant-temperature fluid supplyapparatuses 20, 201 and 202 are employed to keep the temperatures ofexternal apparatuses 30, 301 and 302 at constant values.

In the third embodiment, the first constant-temperature water 102 issupplied to three apparatuses, namely constant-temperature fluid supplyapparatus 20, constant-temperature fluid supply apparatus 201 andconstant-temperature fluid supply apparatus 202. As in the firstembodiment, each of the constant-temperature fluid supply apparatuses20, 201 and 202 comprises a Peltier element.

The second constant-temperature water 103 supplied from the output sideof constant-temperature fluid supply apparatus 20 flows to externalapparatus 30 and keeps this external apparatus at a constanttemperature. The second constant-temperature water 104 supplied from theoutput side of constant-temperature fluid supply apparatus 201 flows toexternal apparatus 301 and keeps this external apparatus at a constanttemperature. The second constant-temperature water 105 supplied from theoutput side of constant-temperature fluid supply apparatus 202 flows tothe external apparatus 302 and keeps this external apparatus at aconstant temperature.

FIG. 7 is a diagram schematically showing an electron beam exposureapparatus whose temperature is to be kept constant. In FIG. 7, referencenumeral 71 denotes a sample chamber, reference numeral 72 denotes anelectronic lens barrel, reference numeral 73 denotes a Z sensorconfigured to detect the height level of the sample surface, referencenumeral 74 denotes a deflection amplifier used for driving a deflectorprovided inside the electronic lens barrel, and reference numeral 75denotes an external power supply. By using the constant-temperaturefluid supply system shown in FIG. 5 or 6, the temperatures at portionsof the electron beam exposure apparatus can be controlled independentlyof one another.

For example, the constant-temperature water 103 which theconstant-temperature fluid supply apparatus 20 supplies to the samplechamber 71 is controlled at 25° C.±0.01° C. The constant-temperaturewater 104 which the constant-temperature fluid supply apparatus 201supplies to the electronic lens barrel 72 and Z sensor 73 is controlledat 24° C.±0.01° C. The constant-temperature water 105 which theconstant-temperature fluid supply apparatus 202 supplies to thedeflection amplifier 74 is controlled to be in the range of 20° C. to30° C.±0.01° C. The constant-temperature water 102 which the firstconstant-temperature fluid supply apparatus 10 supplies to the powersupply 75 is controlled to be in the range of 20° C. to 30° C.±0.1° C.

The constant-temperature fluid supplied to the electronic lens barrel 72and Z sensor 73 is set at a temperature slightly lower than that of theconstant-temperature fluid supplied to the sample chamber 71, becausethe electronic lens barrel 72 and Z sensor 73 have a heat generatingsection. The temperature of the differential amplifier 74 has to becontrolled with high accuracy, but the temperature itself need notlimited to a specific value. The temperature of the external powersupply 75 need not be controlled with high accuracy. Since the externalpower supply 75 merely needs to be cooled to some extent, the supply ofwater 102 is sufficient.

As described above, a plurality of constant-temperature fluid supplyapparatuses are selectively used to control the temperatures of portionsof an object in accordance with the heat the object portions maygenerate and the temperature control range the object portions mayrequire. The use of a plurality of constant-temperature fluid supplyapparatuses enables efficient temperature control.

Fourth Embodiment

FIG. 8 is a schematic diagram showing a constant-temperature fluidsupply system according to the fourth embodiment. In FIG. 8, similar orcorresponding structural elements are denoted by the same referencenumerals as used in FIG. 1, and a detailed description of suchstructural elements will be omitted herein.

The fourth embodiment differs from the first embodiment in that thefirst constant-temperature fluid supply apparatus 10 and the secondconstant-temperature fluid supply apparatus 20 are connected directly toeach other and are integrally assembled together. To be more specific,the first and second constant-temperature fluid supply apparatuses arefixed to the same base 50, and the output side of fluid supply apparatus10 and the input side of fluid supply apparatus 20 are coupled together.

With this structure, the fourth embodiment produces similar advantagesto those of the first embodiment. In addition to this, the entire systemcan be small in size because the first and second constant-temperaturefluid supply apparatuses 10 and 20 are integrally assembled as one body.

Modification

The present invention is not limited to the embodiments described above.In the embodiments described above, the first constant-temperature fluidsupply apparatus is provided with either (i) a cooling mechanismincluding the evaporator and condenser shown in FIG. 2, or (ii) acooling mechanism including the heat exchanger shown in FIG. 4. Thepresent invention is not limited to these configurations and may bevaried as needed. The first constant-temperature fluid supply apparatusdoes not require such high precision as needed by the secondconstant-temperature fluid supply apparatus, so that the formerapparatus is preferably made of a low-cost apparatus. The secondconstant-temperature fluid supply apparatus employs a Peltier element,but may be of any type as long as highly accurate control is ensured.

The constant-temperature fluid is not limited to water but may beanother kind of liquid. In addition, the cooling water used with thefirst constant-temperature fluid supply apparatus may be replaced with agas. To be more specific, the heat-waste side of the firstconstant-temperature fluid supply apparatus may be cooled by the air byproviding a cooling fan.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A constant-temperature fluid supply system comprising: a firstconstant-temperature fluid supply apparatus having an input side towhich a cooling fluid not controlled in temperature is supplied, and anoutput side from which a first constant-temperature fluid having astable temperature is supplied; and a second constant-temperature fluidsupply apparatus having an input side to which the firstconstant-temperature fluid is supplied, and an output side from which asecond constant-temperature fluid having a more stable temperature thanthat of the first constant-temperature fluid is supplied.
 2. Theconstant-temperature fluid supply system according to claim 1, whereinthe first constant-temperature fluid supply apparatus comprises acooling mechanism including an evaporator and a condenser, the coolingfluid and the first constant-temperature fluid exchange heat, the inputside of the first constant-temperature fluid is a heat-waste side wherea passage of the cooling fluid is formed, and the output side of thefirst constant-temperature fluid is a cooling side where a passage ofthe first constant-temperature fluid is formed.
 3. Theconstant-temperature fluid supply system according to claim 1, whereinthe second constant-temperature fluid supply apparatus includes aPeltier element having input and output sides, the input side of thePeltier element is a heat-waste side where a passage of the firstconstant-temperature fluid is formed, and the output side of the Peltierelement is a heat-absorbent side where a passage of the secondconstant-temperature fluid is formed.
 4. The constant-temperature fluidsupply system according to claim 3, wherein the secondconstant-temperature fluid supply apparatus further includes at leastone Peltier element in addition to said Peltier element, and the secondconstant-temperature fluid supply apparatus supplies secondconstant-temperature fluids of different temperatures.
 5. Theconstant-temperature fluid supply system according to claim 1, whereinthe first constant-temperature fluid is controlled such that thetemperature thereof is ±0.1° C. of a setting temperature, and the secondconstant-temperature fluid is controlled such that the temperaturethereof is ±0.01° C. of a setting temperature.
 6. Theconstant-temperature fluid supply system according to claim 1, whereinthe second constant-temperature fluid is supplied to an object whosetemperature is to be controlled, and a passage between the secondconstant-temperature fluid supply apparatus and the object is thermallyinsulated by a heat insulator.
 7. A constant-temperature fluid supplysystem configured to keep a first portion and a second portion of anobject at predetermined temperatures, said constant-temperature fluidsupply system comprising: a first constant-temperature fluid supplyapparatus having an input side to which a cooling fluid not controlledin temperature is supplied, and an output side from which a firstconstant-temperature fluid having a stable temperature is supplied, partof the first constant-temperature fluid being supplied to the firstportion of the object; and a second constant-temperature fluid supplyapparatus having an input side to which remaining part of the firstconstant-temperature fluid is supplied, and an output side from which asecond constant-temperature fluid having a more stable temperature thanthat of the first constant-temperature fluid is supplied.
 8. Theconstant-temperature fluid supply system according to claim 7, whereinthe first constant-temperature fluid supply apparatus comprises acooling mechanism including an evaporator and a condenser, the coolingfluid and the first constant-temperature fluid exchange heat, the inputside of the first constant-temperature fluid is a heat-waste side wherea passage of the cooling fluid is formed, and the output side of thefirst constant-temperature fluid is a cooling side where a passage ofthe first constant-temperature fluid is formed.
 9. Theconstant-temperature fluid supply system according to claim 7, whereinthe second constant-temperature fluid supply apparatus includes aPeltier element having input and output sides, the input side of thePeltier element is a heat-waste side where a passage of the firstconstant-temperature fluid is formed, and the output side of the Peltierelement is a heat-absorbent side where a passage of the secondconstant-temperature fluid is formed.
 10. The constant-temperature fluidsupply system according to claim 9, wherein the secondconstant-temperature fluid supply apparatus further includes at leastone Peltier element in addition to said Peltier element, and the secondconstant-temperature fluid supply apparatus supplies secondconstant-temperature fluids of different temperatures.
 11. Theconstant-temperature fluid supply system according to claim 7, whereinthe first constant-temperature fluid is controlled such that thetemperature thereof is ±0.1° C. of a setting temperature, and the secondconstant-temperature fluid is controlled such that the temperaturethereof is ±0.01° C. of a setting temperature.
 12. Theconstant-temperature fluid supply system according to claim 7, wherein apassage between the second constant-temperature fluid supply apparatusand the object is thermally insulated by a heat insulator.
 13. Aconstant-temperature fluid supply system configured to keep a firstportion and a second portion of an object at predetermined temperatures,said constant-temperature fluid supply system comprising: a firstconstant-temperature fluid supply apparatus having an input side towhich a cooling fluid not controlled in temperature is supplied, and anoutput side from which a first constant-temperature fluid having astable temperature is supplied; and a second constant-temperature fluidsupply apparatus having an input side to which the firstconstant-temperature fluid is supplied, and an output side from which asecond constant-temperature fluid having a more stable temperature thanthat of the first constant-temperature fluid is supplied. a thirdconstant-temperature fluid supply apparatus having an input side towhich the first constant-temperature fluid is supplied, and an outputside from which a third constant-temperature fluid having a more stabletemperature than that of the first constant-temperature fluid issupplied to the second portion of the object.
 14. Theconstant-temperature fluid supply system according to claim 13, whereinthe second constant-temperature fluid supplied from the second fluidconstant-temperature fluid supply apparatus and the thirdconstant-temperature fluid supplied from the third constant-temperaturefluid supply apparatus are set at different temperatures.
 15. Theconstant-temperature fluid supply system according to claim 13, whereinthe first constant-temperature fluid supply apparatus comprises acooling mechanism including an evaporator and a condenser, the coolingfluid and the first constant-temperature fluid exchange heat, the inputside of the first constant-temperature fluid is a heat-waste side wherea passage of the cooling fluid is formed, and the output side of thefirst constant-temperature fluid is a cooling side where a passage ofthe first constant-temperature fluid is formed.
 16. Theconstant-temperature fluid supply system according to claim 13, whereineach of the second and third constant-temperature fluid supplyapparatuses includes a Peltier element having input and output sides,the input side of the Peltier element is a heat-waste side where apassage of the first constant-temperature fluid is formed, and theoutput side of the Peltier element is a heat-absorbent side where apassage of the second constant-temperature fluid is formed.
 17. Theconstant-temperature fluid supply system according to claim 13, whereinthe first constant-temperature fluid is controlled such that thetemperature thereof is ±0.1° C. of a setting temperature, and the secondand third constant-temperature fluids are controlled such that thetemperatures thereof are ±0.01° C. of setting temperatures.
 18. Theconstant-temperature fluid supply system according to claim 13, whereina passage between the second constant-temperature fluid supply apparatusand the object and a passage between the third constant-temperaturefluid supply apparatus and the object are thermally insulated by a heatinsulator.